OVALiS

On-product overlay optimization

For leading-edge semiconductor fabs, overlay is nowadays one of the major bottlenecks for achieving good process yields. Equipment vendors offer solutions to optimize single machine overlay (SMO) and matched machine overlay (MMO), but these solutions are equipment related, work only with reference wafers, and do not take product specific effects into account.

With the OVALiS software suite, Qoniac introduces a novel solution taking product specific effects into account. OVALiS optimizes the on-product overlay and the product specific MMO, using automated mass data analysis.

In short, OVALiS answers the every day question:
“Which alignment, metrology and APC settings will deliver
the best overlay performance specific for the product.”

Overlay Budget

Delivering the best overlay settings for a product is not the only feature of OVALiS. The software suite also delivers:

  • Throughput optimization
  • Overlay excursion monitoring and control
  • Detailed analysis toolbox for diagnostic troubleshooting
  • Multi-vendor MMO optimization
  • Faster and better process stability
  • Reduced need for experiments

The automated mass analysis of OVALiS is performed with the combined production data from both exposure tools and metrology tools. For this purpose, OVALiS uses a client-server architecture, meaning that the mass data analysis is processed on a server. From all locations in a fab, users can access the data on the server.

The OVALiS Suite is thus the most advanced software suite for optimization and control of on-product overlay and exposure tool throughput. In combination with the OVALiS suite, Qoniac provides a thorough training program and application support. Currently, the suite consists of three modules:

  • OPAL – Overlay & Throughput Optimization
  • ONYX – Overlay Excursion Monitoring & Control
  • OSMIUM – Diagnostics Toolbox
 

Qoniac’s software solutions provide unprecedented
features to improve yield and efficiency of lithography
challenges in a demanding production environment
with a fast Return On Investment