Diagnostics Toolbox

Additional to OPAL and ONYX, several advanced analysis methods are provided in the OSMIUM toolbox that is part of OVALiS. The toolbox enables process experts to perform a wide range of diagnostic analyses on overlay and alignment data. At the same time, it offers less experienced engineers the possibility to perform basic analyses as well.

The analyses enable diagnostic troubleshooting, with solutions to complex processing problems. Equipment related problems are found as fast as possible. The integration in the OVALiS suite offers users fast access to all the necessary data to perform these tasks. The OSMIUM toolbox includes the following functionality:

• Combined plots of both (!) overlay and alignment data in one view enabling detailed analyses of physical aspects. Examples are vector, scatter and bubble plots.
• Parameter plots, box plots, histograms, correlations, in-spec plots and budget breakdown plots of key parameters enable statistical analyses. Examples are non-linearity analyses, parameter effect comparisons, chuck-to-chuck analyses, signature recognitions, wafer comparisons, other data correlations, etc.
• Trend plots enable the tracking of key parameters like overlay and other process stability parameters, such that process deviations are readily detected.
• A matching module enables on-product MMO optimization, multi-vendor MMO optimization, and other matching between exposure tools, chucks and other process groups.