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Contact Probes

Contact Probes

Filmetrics contact probes are suited for measuring thin films on curved and rough surfaces. The contact probes measure the thickness, refractive index and other parameters of thin films including flat or spherical samples, cylindrical and spherical samples as well as tighter concave surfaces. The unique design of each contact probe gives it superior performance and ease-of-use on flat, convex, and concave surfaces with no need for re-baselining or backside preparation.

KLA Filmetrics optical contact probe CP-1-1.3

CP-1-1.3 Contact Probe

Contact probe for measuring on flat or spherical samples. Ruggedized stainless steel monocoil.

$1767.70

Purchase via the Accessories Store

KLA Filmetrics optical contact probe CP-1-AR-1.3

CP-1-AR-1.3 Contact Probe

Similar to the CP-1-1.3, except optimized to reject backside reflections (96% rejection for substrate 1.5mm thick). PVC-coated steel monocoil. For thicknesses up to 15µm.

$1961.16

Purchase via the Accessories Store

KLA Filmetrics optical contact probe CP-2-1.3

CP-2-1.3 Contact Probe

Contact probe for getting into tighter concave surfaces. 17.5mm diameter.

$1927.14

Purchase via the Accessories Store

KLA Filmetrics optical contact probe CP-C6-1.3

CP-C6-1.3 Contact Probe

Contact probe for outside of cylindrical and spherical samples down to 6mm diameter.

KLA Filmetrics optical contact probe CP-C12-1.3

CP-C12-1.3 Contact Probe

Contact probe for outside of cylindrical and spherical samples down to 12mm diameter.

KLA Filmetrics optical contact probe CP-C26-1.3

CP-C26-1.3 Contact Probe

Contact probe for outside of cylindrical and spherical samples down to 26mm diameter.

If you are a current KLA Employee, please apply through the KLA Intranet on My Access.

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