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Step Height Standards

Step Height Standards

Filmetrics provides step height standards specifically designed for use in optical profilometry. Step height standards guarantee that the results you get time over time will be accurate and reliable measurements. Our step height standards may be used to calibrate your Filmetrics® 3D Optical Profiler measurement system. These standards are chromium on silicon with a nominal step height measurement of 10µm. A multi-thickness step height standard is also available with nominal step values of 4µm, 2µm, and 100nm.

SHS-CrOnSi-10µm Step Height Standard

Step height standard with 10µm step. Cr surface on 1.25″ square Si.

$615.46

Purchase via the Accessories Store

SHS-CrOnSi-Multi-4µm Step Height Standard

Step height standard with 4µm, 2µm and 100nm steps. Cr surface on 1.25″ square Si.

$1560.42

Purchase via the Accessories Store

If you are a current KLA Employee, please apply through the KLA Intranet on My Access.

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