Film Thickness Standards
Film Thickness Standards
KLA Instruments offers a wide selection of thin-film thickness standards for calibrating and verifying the accuracy of thin-film measurement systems. KLA Instruments thin-film thickness standards meet the highest industry standards and can be supplied as NIST-traceable. If you don’t see the thickness standard you need for your film thickness measurements, please contact us. Our team of experts will work with you to provide the right thin-film thickness standard solution for your needs.
TS-Focus-SiO2-4-3100 Thickness Standard
SiO2-on-Si thickness standard with focus area, approximately 3100Å thick, 4 inch wafer.
$1021.50
TS-Focus-SiO2-4-10000 Thickness Standard
SiO2-on-Si thickness standard with focus area, approximately 10000Å thick, 4 inch wafer.
$1074.65
TS-FusedSilica-.125mm Thickness Standard
Fused silica thickness standard, approximately 0.125mm thick.
$218.97
TS-Hardcoat-4µm Thickness Standard
Hardcoat-on-acrylic thickness standard, approximately 4µm thick, 2 inch diameter.
$218.97
TS-Hardcoat-Trans Thickness Standard
Hardcoat with transparent backside for transmittance measurements.
$218.97
TS-Parylene-8µm Thickness Standard
Parylene-on-silicon thickness standard, approximately 8µm thick, 23mm x 23mm.
$162.63
TS-Si-2-250µm Thickness Standard
Si thickness standard, approximately 250µm thick, 2″ wafer.
$145.62
TS-SiO2-4-7200 Thickness Standard
SiO2-on-Si thickness standard, approximately 7200Å thick, 4 inch wafer.
$470.89
TS-SiO2-4-7200-NIST Thickness Standard
NIST-traceable TS-SiO2-4-7200.
TS-SiO2-6-Multi Thickness Standard
SiO2-on-Si multiple thickness standard: 125Å, 250Å, 500Å, 1000Å, 5000Å, and 10000Å (actual thicknesses +/-10% nominal values, accurate to within 2Å), on 6 inch wafer.
TS-SS3-SiO2-2000 Thickness Standard
SiO2-on-Si thickness standard, approximately 2000Å thick, for SS-3 stage.
$577.19
TS-SS3-SiO2-8000 Thickness Standard
SiO2-on-Si thickness standard, approximately 8000Å thick, for SS-3 stage.
$577.19
TS-SS3-SiO2-16000 Thickness Standard
SiO2-on-Si thickness standard, approximately 16000Å thick, for SS-3 stage.
$560.92
TS-SiO2-2500nm-High-n-Glass Thickness Standard
SiO2-on-High-n-Glass thickness standard, approximately 2500nm thick, 2″ diameter.
$156.25
TS-SiO2-8000nm-High-n-Glass Thickness Standard
SiO2-on-High-n-Glass thickness standard, approximately 8000nm thick, 2″ diameter.
$156.25