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Filmetrics® F50 Automated Film Thickness Mapper

Filmetrics F50 film thickness measurement mapping instrument
Filmetrics f50 and chuck
Filmetrics F50 and chuck

Filmetrics® F50 Automated Film Thickness Mapper

The F50 offers additional capabilities from our F20 series, including an automated R-Theta stage, to map film thickness of wafers up to 450mm at about 0.5 seconds per site.

The Filmetrics F50 measures film thickness of photoresist, polymer films, and other non-metallic films, provided the film is smooth and has a known refractive index model.

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