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Filmetrics® F54-XY-200 and F54-XY-300 Film Thickness Measurement Mapping Instruments

Filmetrics F54 opened
F54 interface screenshot
Filmetrics F54-XY FILMeasure software displaying pattern recognition setup for semiconductor wafer

Filmetrics® F54-XY-200 and F54-XY-300 Film Thickness Measurement Mapping Instruments

The F54-XY Series of automated benchtop mapping systems measure film thickness, refractive index, reflectance, absorption, and surface roughness for patterned samples up to 300mm in diameter. Five configurations cover film thickness from 4nm up to 120µm, with spot size from 2µm to 100µm.

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