Semiconductor: Amorphous Silicon (a-Si) and Poly Crystalline Silicon Thickness Measurement

Measure the optical constants (n and k) of both amorphous and polysilicon with the Filmetrics F54. The tool includes sophisticated measurement routines that simultaneously measure and report the substrate thickness, the silicon layer thickness as well as the interlayer SiO₂ thickness, all with a single mouse-click. We also offer free trial Si wafer thickness measurements – with results typically available in 1-2 days.

Semiconductor: Dielectric Properties Measurement

Accurate measurement of dielectric films is critical for the electronics industry. Here are the most common dielectric measurements characterized by a Filmetrics measurement system:

• Silicon dioxide thickness: SiO₂ film thickness can be measured by our Filmetrics systems, from 3nm up to 1mm thick.
• Refractive index of silicon nitride (Si₃N₄): Measuring silicon nitride refractive index alongside the thickness of the film allows complete characterization of your Si₃N₄ film in seconds. Contact our thin-film experts to discuss your dielectric application or ask for a free trial.

Display: ITO Film Thickness

Measure film thickness of indium tin oxide (ITO) and other transparent conductive oxides (TCOs) using accurate measurements of refractive index. Filmetrics tools can measure liquid crystal layers, including polyimide, hardcoat, liquid crystal and OLED layers, including the emission, injection, buffer, and encapsulation layers.

Biomedical Coatings Thickness Measurement

Measure thickness of coatings for biomedical applications such as catheter and angioplasty balloons, stents, guide wires, needles and other implants with one click. Biomedical devices have specialized coatings to protect the device from corrosion while others protect from complications such as tissue trauma, infection, or even rejection. Measuring coating thickness of drug delivery devices is also a common application. Our Filmetrics tools can deliver fast and reliable thickness measurements that are non-destructive and require no sample preparation.

Display: OLED Metrology

Organic Light-Emitting Diodes (OLEDs) are used in many display devices, including cell phones and TVs. The metrology of the many thin films that make up OLED displays is of critical importance and requires a non-contact measurement system to effectively measure OLED thickness. Our F54-UV film thickness measurement instrument offers inexpensive, robust, and non-invasive metrology of simple prototype devices and fully pixelated displays. Because our OLED measurement instruments are spectroscopic, one can also detect chemical changes that can occur in these atmospherically sensitive materials. We also offer free trials of thickness measurements of OLED film samples.

Semiconductor: Photoresist Thickness Measurement

The F54 single-spot tabletop and mapping tool measures photoresist thickness and etch rate of single-layer, multiple-layer, and even freestanding photoresist films. All Filmetrics models measure resist thickness (and index) by accurately modeling spectral reflectance. Special proprietary algorithms allow robust “one-click” analysis, with results typically available in less than a second. Measurement of SU-8 thickness, Dow BCB thickness and other thick photoresists are popular applications for the Filmetrics product line.

Porous Silicon Thin Film Measurement

Porous silicon has significant usage in a wide range of applications, including optical devices, gas sensors, and biomedical devices.

Porous thin-film measurements of interest include layer thickness and porosity. In general, non-destructive methods like gravimetric measurements are used to measure porosity, but the accuracy of this method is very low. Filmetrics^® F54 offers a free, unique analysis algorithm that reveals layer thickness, index, and porosity of porous silicon with a single mouse-click.

Silicon Wafer and Membrane Thickness Measurement

Filmetrics^® systems include tabletop, mapping, and production systems for silicon wafer thickness measurement and membrane thickness measurement. Wafer materials commonly measured include single polished or double polished Silicon, Sapphire, Fused Silica, SiC, LiTaO₃, GaN, and Glass.

Our technical experts can help you find the best Filmetrics tool that fits your thickness measurement requirements that may include a need for various thickness ranges or a single-spot measurement vs. thickness mapping requirement, etc.